CW 266 nm DUV Laser
Product Overview
CW 266 nm DUV Laser Frequad Series is a deep-ultraviolet (DUV) wavelength (266 nm) continuous-wave (CW) single frequency wavelength laser which has more than 20 years of history. OXIDE’s highly reliable wavelength conversion module and unique high-speed, precision voice coil motor (VCM) laser enables stable operation of CW. Depending on the output power, you can select suitable operation from three types – Frequad-HP, Frequad-M, and Frequad-C.
Features
・Ultra-high purity BBO crystal
The outstanding quality of OXIDE’s own BBO crystal provides over 3000 hours single-spot lifetime at 1W output power, and over 1000 hours at 2W. Furthermore, the little deterioration of the crystal assures stable operation for a long period of time at high beam quality.
・Sophisticated servo lock technology
OXIDE’s unique high-speed, high-precision voice coil motor (VCM) servo actuator offers stable CW operation of laser.
・Low power consumption
The highly efficient wavelength conversion laser system realized extremely low power consumption – less than 340W.
Specifications
| Model | Frequad-HP FQ50-20/-10 |
Frequad-M FQM-10/-07/-05/-03 |
Frequad-C FQC-50/-20 |
 |
 |
 |
|
| Wavelength | 266 nm | 266 nm | 266 nm |
| Output power | 2.0/1.0 W | 1.0/0.7/0.5/0.3 W | 50/20 mW |
| Linewidth | < 0.005 pm | < 0.005 pm | < 0.005 pm |
| Power Stability | < +/-1 %/8 hrs | < +/-1 %/8 hrs | < +/-3 %/8 hrs |
| Extinction Ratio | > 100:1 | > 100:1 | > 100:1 |
| Beam Quality | TEM00, M2 < 1.2 | TEM00, M2 < 1.2 | TEM00, M2 < 1.3 |
| Polarization | Vertical, Linear | Vertical, Linear | Vertical, Linear |
| Beam Diameter | 3 mm ±0.3 mm | 3 mm ±0.3 mm | 0.8 mm ±0.2 mm |
| Divergence (1/e2) | < 0.2 mrad | < 0.2 mrad | < 0.4 mrad |
| Power Supply | AC 100-240V 50/60Hz |
AC 100-240V 50/60Hz |
AC 100-240V 50/60Hz |
| Power Consumption | < 300 W | < 340 W | < 70 W |
| Cooling | Air | Water | Air |
| Dimensions (Head) | 240 x 840 x 160 mm | 350 x 590 x 124 mm | 153 x 202 x 79 mm |
Applications
- Semiconductor inspection
- Raman spectroscopy
- Photoluminescence
- Disk mastering
- Fiber bragg grating